Index of /~gale/mems/_vti_cnf

[ICO]NameLast modifiedSizeDescription
[PARENTDIR]Parent Directory   -  
[ ]Diffusion.pdf 2004-05-12 15:42 227  
[ ]Exam 1 Review Sheet ..>2004-05-12 15:42 227  
[ ]Exam 2 Review Sheet.pdf2004-05-12 15:42 148  
[ ]Final Exam Review Sh..>2004-05-12 15:42 148  
[ ]Final Report Guideli..>2004-05-12 15:42 148  
[ ]Homework 1.pdf 2004-05-12 15:42 227  
[ ]Lab 01 Safety.pdf 2004-05-12 15:42 228  
[ ]Lab 02 Photolithogra..>2004-05-12 15:42 148  
[ ]Lab 03 Wet Oxidation..>2004-05-12 15:42 148  
[ ]Lab 04 Pattern Gener..>2004-05-12 15:42 148  
[ ]Lab 05 E-Beam Deposi..>2004-05-12 15:42 148  
[ ]Lab 06 KOH etching a..>2004-05-12 15:42 148  
[ ]Lab 07 Soft Lithogra..>2004-05-12 15:42 148  
[ ]Lab 08 Electroplatin..>2004-05-12 15:42 148  
[ ]Lab 09-12 Projects.pdf 2004-05-12 15:42 148  
[ ]Lab Section Assignme..>2004-05-12 15:42 148  
[ ]Lecture 01 Introduct..>2004-05-12 15:42 389  
[ ]Lecture 02 Chemistry..>2004-05-12 15:42 227  
[ ]Lecture 02 DIWater.pdf 2004-05-12 15:42 227  
[ ]Lecture 03 Clean Roo..>2004-05-12 15:42 228  
[ ]Lecture 03 Vacuum Sy..>2004-05-12 15:42 228  
[ ]Lecture 05 Ji Fang M..>2004-05-12 15:42 228  
[ ]Lecture 06 Materials..>2004-05-12 15:42 229  
[ ]Lecture 07 CVD and O..>2004-05-12 15:42 228  
[ ]Lecture 08 Dry Etchi..>2004-05-12 15:42 229  
[ ]Lecture 10 Wet Etchi..>2004-05-12 15:42 148  
[ ]Lecture 11 PVD.pdf 2004-05-12 15:43 148  
[ ]Lecture 12 Electrode..>2004-05-12 15:43 148  
[ ]Lecture 13 Other Mic..>2004-05-12 15:43 148  
[ ]Lecture 15 LIGA.pdf 2004-05-12 15:43 148  
[ ]Lecture 15 Polymers ..>2004-05-12 15:43 148  
[ ]Lecture 16a Bonding.pdf2004-05-12 15:43 148  
[ ]Lecture 16b MEMS Pac..>2004-05-12 15:43 148  
[ ]Lecture 17a Microele..>2004-05-12 15:43 148  
[ ]Lecture 17b Packagin..>2004-05-12 15:43 148  
[ ]Lecture 18 MEMS CAD.pdf2004-05-12 15:43 148  
[ ]Lecture 19 MEMS Metr..>2004-05-12 15:43 148  
[ ]Lecture 21 Optical M..>2004-05-12 15:43 148  
[ ]Lecture 22 Mechanica..>2004-05-12 15:43 148  
[ ]Lecture 23 Electrica..>2004-05-12 15:43 148  
[ ]Lecture 24 Chemical ..>2004-05-12 15:43 148  
[ ]Lecture 25 Microflui..>2004-05-12 15:43 148  
[ ]Lecture 26a BioMEMS.pdf2004-05-12 15:43 148  
[ ]Lecture 26b BioMEMS.pdf2004-05-12 15:43 148  
[ ]Lecture 26c BioMEMS.pdf2004-05-12 15:43 148  
[ ]Lecture 26d BioMEMS.pdf2004-05-12 15:43 148  
[ ]Lecture 27 Nanotechn..>2004-05-12 15:43 148  
[ ]Mask Layout Example.pdf2004-05-12 15:43 148  
[ ]Mask Problems.pdf 2004-05-12 15:43 148  
[ ]Poster Award Sheet.pdf 2004-05-12 15:43 148  
[ ]Poster Grading Sheet..>2004-05-12 15:43 148  
[ ]Poster Guidelines.pdf 2004-05-12 15:43 148  
[ ]Practice Problems 2.pdf2004-05-12 15:43 148  
[ ]Practice Problems 2 ..>2004-05-12 15:43 148  
[ ]Project Due Dates.pdf 2004-05-12 15:43 227  
[ ]Proposal Guidelines.pdf2004-05-12 15:43 148  
[ ]Syllabus 2002 Utah M..>2004-05-12 15:43 330  
[TXT]WS_FTP.LOG 2004-05-12 15:43 378  
[ ]crystal.pdf 2004-05-12 15:42 227  
[ ]etch rates.pdf 2004-05-12 15:42 227  
[ ]exposred.pdf 2004-05-12 15:42 216  
[ ]manufspecs.pdf 2004-05-12 15:43 228  
[IMG]microgear.gif 2004-05-12 15:43 389  
[ ]microlithtexred.pdf 2004-05-12 15:43 217  
[ ]negresred.pdf 2004-05-12 15:43 216  
[ ]photolithred.pdf 2004-05-12 15:43 216  
[ ]posresred.pdf 2004-05-12 15:43 216  
[ ]postertips.pdf 2004-05-12 15:43 229